Open AccessReflection zone plate wavelength-dispersive spectrometer for ultra-light elements measurements
Author(s) -
Aljoša Hafner,
Lars Anklamm,
А. А. Фирсов,
Alexander A. Firsov,
Heike Löchel,
Andréy Sokolov,
R. Gubzhokov,
Alexei Erko
Publication year - 2015
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.029476
Subject(s) - spectrometer , optics , materials science , scanning electron microscope , wavelength , imaging spectrometer , analytical chemistry (journal) , optoelectronics , physics , chemistry , chromatography
We have developed an electron beam excitation ultra-soft X-ray add-on device for a scanning electron microscope with a reflective zone plate mulichannel spectrometer in order to analyse ultra-light elements such as Li and B. This spectrometer has high (λ/Δλ~100) resolving power in the energy range of 45 eV - 1120 eV. Metallic Li samples were examined and fluorescence spectra successfully measured. Energy resolution of 0.49 eV was measured in the ultra-low energy range using the Al L(2,3) line at 71 eV. High sensitivity of Boron detection was demonstrated on a B(4)C sample with layer thicknesses of 1-50 nm, detecting an amount of metallic Boron as small as ~0.57 fg.