Open AccessLarge-stroke convex micromirror actuated by electromagnetic force for optical power control
Author(s) -
Md. Mahabub Hossain,
Bin Wu
Publication year - 2015
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.028358
Subject(s) - optics , actuator , aperture (computer memory) , materials science , microelectromechanical systems , solenoid , optical power , dioptre , fabrication , microactuator , magnet , optoelectronics , physics , electrical engineering , acoustics , laser , engineering , medicine , alternative medicine , visual acuity , pathology
This paper contributes a novel design and the corresponding fabrication process to research on the unique topic of micro-electro-mechanical systems (MEMS) deformable convex micromirror used for focusing-power control. In this design, the shape of a thin planar metal-coated polymer-membrane mirror is controlled electromagnetically by using the repulsive force between two magnets, a permanent magnet and a coil solenoid, installed in an actuator system. The 5 mm effective aperture of a large-stroke micromirror showed a maximum center displacement of 30.08 µm, which enabled control of optical power across a wide range that could extend up to around 20 diopters. Specifically, utilizing the maximum optical power of 20 diopter by applying a maximum controlling current of 0.8 A yielded consumption of at most 2 W of electrical power. It was also demonstrated that this micromirror could easily be integrated in miniature tunable optical imaging systems.