Open AccessMeasurement of optical thickness variation of BK7 plate by wavelength tuning interferometry
Author(s) -
Yangjin Kim,
Kenichi Hibino,
Naohiko Sugita,
Mamoru Mitsuishi
Publication year - 2015
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.022928
Subject(s) - optics , fizeau interferometer , interferometry , wavelength , materials science , sample (material) , phase (matter) , modulation (music) , coupling (piping) , variation (astronomy) , intensity (physics) , physics , astronomical interferometer , acoustics , quantum mechanics , astrophysics , metallurgy , thermodynamics
This paper presents the derivation of a 17-sample phase-shifting algorithm that can compensate the miscalibration and first-order nonlinearity of phase shift error, coupling error, and bias modulation of the intensity and satisfy the fringe contrast maximum condition. The phase error of measurements performed using the 17-sample algorithm is discussed and compared with those of measurements obtained using other algorithms. Finally, the optical thickness variation of a BK7 optically transparent plate obtained using a wavelength tuning Fizeau interferometer and the 17-sample algorithm are presented. The experimental results indicate that the optical thickness variation measurement accuracy for the BK7 plate was 3 nm.