High-accuracy self-mixing interferometer based on single high-order orthogonally polarized feedback effects

A simple and high-accuracy self-mixing interferometer based on single high-order orthogonally polarized feedback effects is presented. The single high-order feedback effect is realized when dual-frequency laser reflects numerous times in a Fabry-Perot cavity and then goes back to the laser resonator along the same route. In this case, two orthogonally polarized feedback fringes with nanoscale resolution are obtained. This self-mixing interferometer has the advantages of higher sensitivity to weak signal than that of conventional interferometer. In addition, two orthogonally polarized fringes are useful for discriminating the moving direction of measured object. The experiment of measuring 2.5nm step is conducted, which shows a great potential in nanometrology.