Open AccessElectromagnetic biaxial microscanner with mechanical amplification at resonance
Author(s) -
Ah Ran Cho,
Aleum Han,
Suna Ju,
Hoonyoung Jeong,
JaeHyoung Park,
Inhoi Kim,
JongUk Bu,
Chang-Hyeon Ji
Publication year - 2015
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.016792
Subject(s) - gimbal , materials science , optics , magnet , perpendicular , surface micromachining , scanner , bulk micromachining , fabrication , medicine , physics , geometry , mathematics , alternative medicine , pathology , quantum mechanics , engineering , aerospace engineering
We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45° to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12° at 21.19kHz and 17.62° at 60Hz have been obtained for horizontal and vertical scans, respectively.