Open AccessUniversal evaluations and expressions of measuring uncertainty for rotating-element spectroscopic ellipsometers
Author(s) -
Yong Jai Cho,
Won Chegal,
Jeong Pyo Lee,
Hyun Mo Cho
Publication year - 2015
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.016481
Subject(s) - metrology , measurement uncertainty , covariance , fourier transform , waveform , optics , instrumentation (computer programming) , computer science , physics , mathematics , mathematical analysis , statistics , telecommunications , radar , operating system
We obtain the universal evaluations and expressions of measuring uncertainty for all types of rotating-element spectroscopic ellipsometers. We introduce a general data-reduction process to represent the universal analytic functions of the combined standard uncertainties of the ellipsometric sample parameters. To solve the incompleteness of the analytic expressions, we formulate the estimated covariance for the Fourier coefficient means extracted from the radiant flux waveform using a new Fourier analysis. Our approach can be used for optimization of measurement conditions, instrumentation, simulation, standardization, laboratory accreditation, and metrology.