Open AccessPiezoelectric actuation of aluminum nitride contour mode optomechanical resonators
Author(s) -
Siddhartha Ghosh,
Gianluca Piazza
Publication year - 2015
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.015477
Subject(s) - resonator , whispering gallery wave , optics , materials science , optoelectronics , piezoelectricity , photonics , vibration , nitride , acoustics , physics , nanotechnology , layer (electronics) , composite material
We present a fully-integrated monolithic aluminum nitride optomechanical device in which lateral vibrations generated by a piezoelectric contour mode acoustic ring resonator are used to produce amplitude modulation of an optical signal in a whispering gallery mode photonic ring resonator. Acoustic and optical resonances are independently characterized in this contour mode optomechanical resonator (CMOMR). Electrically driven mechanical modes are optically detected at 35MHz, 654MHz and 884MHz.