Open AccessDiffractive microlens integrated into Nb_5N_6 microbolometers for THz detection
Author(s) -
Xuecou Tu,
Lin Kang,
Chenhao Wan,
Lei Xu,
Q. K. Mao,
Peng Xiao,
Xiaoqing Jia,
Wenbin Dou,
Jian Chen
Publication year - 2015
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.013794
Subject(s) - microbolometer , microlens , responsivity , materials science , noise equivalent power , optics , optoelectronics , wafer , silicon , substrate (aquarium) , fabrication , detector , lens (geology) , photodetector , bolometer , physics , alternative medicine , pathology , geology , medicine , oceanography
We fabricated square diffractive microlens array with five staircases in the THz wave band for Nb 5 N 6 microbolometers. With each microlens intergrated with an Nb 5 N 6 microbolometer on the same substrate, an array chip was fabricated in the 4 inches silicon wafer. The lens exhibits good focusing and improves the coupling efficiency. The voltage response of the microbolometer integrated with diffractive microlens is 16 times higher than that of the microbolometer fabricated on silicon substrate. The microbolometers used as room-temperature detectors yield a good responsivity of 71 V/W and a noise equivalent power of 1.0 × 10 -10 W/Hz. The diffractive microlens array features light weight, low absorption loss, and high resolution and can be mass produced using standard micro-fabrication techniques.