Large-scale two-dimensional MoS_2 photodetectors by magnetron sputtering | Zendy

Zhi Peng Ling | Zendy; Rui Yang | Zendy; J. W. Chai | Zendy; Shijie Wang | Zendy; Wei Sun Leong | Zendy; Yu Tong | Zendy; Dian Lei | Zendy; Qian Zhou | Zendy; Xiao Gong | Zendy; D. Z. | Zendy; KahWee Ang | Zendy

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Large-scale two-dimensional MoS_2 photodetectors by magnetron sputtering

Author(s) -

Zhi Peng Ling,

Rui Yang,

J. W. Chai,

Shijie Wang,

Wei Sun Leong,

Yu Tong,

Dian Lei,

Qian Zhou,

Xiao Gong,

D. Z.,

KahWee Ang

Publication year - 2015

Publication title -

optics express

Language(s) - Uncategorized

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.23.013580

Subject(s) - photodetector , molybdenum disulfide , monolayer , materials science , optoelectronics , sputter deposition , quantum efficiency , sputtering , wavelength , optics , molybdenum , thin film , nanotechnology , physics , composite material , metallurgy

We report on the demonstration of photodetectors based on large scale two-dimensional molybdenum disulfide (MoS2) transition metal dichalcogenides. Excellent film uniformity and precise control of the MoS2 thickness down to a monolayer (~0.75nm) were achieved by magnetron sputtering synthesis approach. In particular, the photodetectors integrated with five MoS2 monolayers exhibit a high photoresponsivity of 1.8 A/W, an external quantum efficiency exceeding 260%, and a photodetectivity of ~5 x 10(8) Jones for a wavelength of 850 nm, surpassing the performance of mechanically exfoliated based photodetectors.

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