Open AccessLarge-scale two-dimensional MoS_2 photodetectors by magnetron sputtering
Author(s) -
Zhi Peng Ling,
Rui Yang,
Jianwei Chai,
S. J. Wang,
Wei Sun Leong,
Ying Tong,
Dian Lei,
Qian Zhou,
Xiao Gong,
D. Z.,
KahWee Ang
Publication year - 2015
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.013580
Subject(s) - photodetector , molybdenum disulfide , materials science , monolayer , optoelectronics , sputter deposition , optics , sputtering , quantum efficiency , wavelength , molybdenum , visible spectrum , thin film , nanotechnology , physics , composite material , metallurgy
We report on the demonstration of photodetectors based on large scale two-dimensional molybdenum disulfide (MoS2) transition metal dichalcogenides. Excellent film uniformity and precise control of the MoS2 thickness down to a monolayer (~0.75nm) were achieved by magnetron sputtering synthesis approach. In particular, the photodetectors integrated with five MoS2 monolayers exhibit a high photoresponsivity of 1.8 A/W, an external quantum efficiency exceeding 260%, and a photodetectivity of ~5 x 10(8) Jones for a wavelength of 850 nm, surpassing the performance of mechanically exfoliated based photodetectors.