300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers | Zendy

Hongwen Xuan | Zendy; Zhigang Zhao | Zendy; Hironori Igarashi | Zendy; Shinji Ito | Zendy; Kouji Kakizaki | Zendy; Yohei Kobayashi | Zendy

Open Access

300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers

Author(s) -

Hongwen Xuan,

Zhigang Zhao,

Hironori Igarashi,

Shinji Ito,

Kouji Kakizaki,

Yohei Kobayashi

Publication year - 2015

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.23.010564

Subject(s) - laser linewidth , materials science , laser , fiber laser , optics , injection seeder , optoelectronics , laser power scaling , physics

A narrow-linewidth, high average power deep-ultraviolet (DUV) coherent laser emitting at 193 nm is demonstrated by frequency mixing a Yb-hybrid laser with an Er-fiber laser. The Yb-hybrid laser consists of Yb-fiber lasers and an Yb:YAG amplifier. The average output power of the 193 nm laser is 310 mW at 6 kHz, which corresponds to a pulse energy of 51 μJ. To the best of our knowledge, this is the highest average power and pulse energy ever reported for a narrow-linewidth 193 nm light generated by a combination of solid-state and fiber lasers with frequency mixing. We believe this laser will be beneficial for the application of interference lithography by seeding an injection-locking ArF eximer laser.

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