Open AccessElectrothermally actuated tip-tilt-piston micromirror with integrated varifocal capability
Author(s) -
Jessica Morrison,
Matthias Imboden,
Thomas D. C. Little,
David J. Bishop
Publication year - 2015
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.009555
Subject(s) - optics , microelectromechanical systems , tilt (camera) , piston (optics) , materials science , beam steering , deflection (physics) , deformable mirror , actuator , beam (structure) , optoelectronics , adaptive optics , wavefront , physics , electrical engineering , engineering , mechanical engineering
MEMS micromirrors have proven to be very important optical devices with applications ranging from steerable mirrors for switches and cross-connects to spatial light modulators for correcting optical distortions. Usually beam steering and focusing are done with different MEMS devices and tilt angles in excess of 10 degrees are seldom obtained. Here we describe a single MEMS device that combines tip/tilt, piston mode and varifocal capability into a single, low cost device with very large tilt angles. Our device consists of a 400 micron diameter mirror driven with thermal bimorphs. We have demonstrated deflection angles of ± 40 degrees along both axes, a tunable focal length which varies between -0.48 mm to + 20.5 mm and a piston mode range of 300 microns - four separately controllable degrees of freedom in a single device. Potential applications range from smart lighting to optical switches and devices for telecom systems.