Open AccessFringe projection 3D microscopy with the general imaging model
Author(s) -
Yilong Yin,
Meng Wang,
Bruce Z. Gao,
Xiaoli Liu,
Xiang Peng
Publication year - 2015
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.006846
Subject(s) - calibration , projector , optics , scheimpflug principle , computer science , structured light 3d scanner , metrology , projection (relational algebra) , depth of field , camera resectioning , computer vision , 3d reconstruction , microscopy , artificial intelligence , computer graphics (images) , physics , algorithm , scanner , cornea , quantum mechanics
Three-dimensional (3D) imaging and metrology of microstructures is a critical task for the design, fabrication, and inspection of microelements. Newly developed fringe projection 3D microscopy is presented in this paper. The system is configured according to camera-projector layout and long working distance lenses. The Scheimpflug principle is employed to make full use of the limited depth of field. For such a specific system, the general imaging model is introduced to reach a full 3D reconstruction. A dedicated calibration procedure is developed to realize quantitative 3D imaging. Experiments with a prototype demonstrate the accessibility of the proposed configuration, model, and calibration approach.