Open AccessAnalytical modeling and tolerance analysis of a linear variable filter for spectral order sorting
Author(s) -
ChengHao Ko,
KeVin Chang,
You–Min Huang
Publication year - 2015
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.005102
Subject(s) - optics , fabrication , materials science , sorting , filter (signal processing) , substrate (aquarium) , transmission (telecommunications) , thin film , evaporation , layer (electronics) , computer science , nanotechnology , algorithm , physics , telecommunications , medicine , oceanography , alternative medicine , pathology , computer vision , thermodynamics , geology
This paper proposes an innovative method to overcome the low production rate of current linear variable filter (LVF) fabrication. During the fabrication process, a commercial coater is combined with a local mask on a substrate. The proposed analytical thin film thickness model, which is based on the geometry of the commercial coater, is developed to more effectively calculate the profiles of LVFs. Thickness tolerance, LVF zone width, thin film layer structure, transmission spectrum and the effects of variations in critical parameters of the coater are analyzed. Profile measurements demonstrate the efficacy of local mask theory in the prediction of evaporation profiles with a high degree of accuracy.