Open AccessResidual vibration reduction of white-light scanning interferometry by input shaping
Author(s) -
Jeong Il Mun,
Taeyong Jo,
Tai-Wook Kim,
Heui Jae Pahk
Publication year - 2015
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.000464
Subject(s) - white light interferometry , optics , metrology , residual , vibration , interferometry , reduction (mathematics) , signal (programming language) , materials science , input shaping , structured light 3d scanner , acoustics , computer science , physics , mathematics , vibration control , algorithm , geometry , scanner , programming language
White-light scanning interferometry is widely used for precision metrology of engineering surfaces. It needs a mechanical scanning for capturing an interferogram that determines where the surface of a measured sample is located. The residual vibration during the scanning procedure distorts the interferogram and it reduces the accuracy and the precision of the system. The residual vibration becomes bigger as the proportional gain gets higher for the fast response. So it is hard to achieve the fast and precise measurement simultaneously. In this study, input shaping which convolves a reference signal with the input shaper is investigated to reduce the residual vibration of the scanning system. The step response data is analyzed using Continuous Wavelet Transform (CWT) to design the input shaper. Using proposed method, the residual vibration of the white light scanning interferometry is reduced and it achieved both faster measurement speed and more accurate measurement.