Direct writing of 150 nm gratings and squares on ZnO crystal in water by using 800 nm femtosecond laser

We present a controllable fabrication of nanogratings and nanosquares on the surface of ZnO crystal in water based on femtosecond laser-induced periodic surface structures (LIPSS). The formation of nanogrooves depends on both laser fluence and writing speed. A single groove with width less than 40 nm and double grooves with distance of 150 nm have been produced by manipulating 800 nm femtosecond laser fluence. Nanogratings with period of 150 nm, 300 nm and 1000 nm, and nanosquares with dimensions of 150 × 150 nm 2 were fabricated by using this direct femtosecond laser writing technique.