Open AccessControl of cavity lifetime of 15 µm wafer-fused VCSELs by digital mirror trimming
Author(s) -
Dalila Ellafi,
В. Яковлев,
Alexei Sirbu,
G. Suruceanu,
Zlatko Micković,
A. Caliman,
A. Mereuta,
E. Kapon
Publication year - 2014
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.22.032180
Subject(s) - materials science , wafer , optics , optoelectronics , etching (microfabrication) , fabrication , trimming , laser , modulation (music) , computer science , nanotechnology , medicine , philosophy , physics , alternative medicine , aesthetics , layer (electronics) , pathology , operating system
Digital chemical etching is used to trim the output mirror thickness of wafer-fused VCSELs emitting at a wavelength near 1.5µm. The fine control of the photon cavity lifetime thus achieved is employed to extract important device parameters and optimize the combination of the threshold current, output power, and direct current modulation characteristics. The fabrication process is compatible with industrial production and should help in improving device yield and in reducing manufacturing costs.