Open AccessVarifocal MOEMS fiber scanner for confocal endomicroscopy
Author(s) -
Tobias Meinert,
Niklas Weber,
Hans Zappe,
Andreas Seifert
Publication year - 2014
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.22.031529
Subject(s) - endomicroscopy , optics , confocal , scanner , materials science , confocal microscopy , lens (geology) , optical fiber , endoscope , physics , medicine , radiology
Based on an advanced silicon optical bench technology with integrated MOEMS (Micro-Opto-Electro-Mechanical-System) components, a piezo-driven fiber scanner for confocal microscopy has been developed. This highly-miniaturized technology allows integration into an endoscope with a total outer probe diameter of 2.5 mm. The system features a hydraulically-driven varifocal lens providing axial confocal scanning without any translational movement of components. The demonstrated resolutions are 1.7 μm laterally and 19 μm axially.