Hexagonal Ag nanoarrays induced enhancement of blue light emission from amorphous oxidized silicon nitride via localized surface plasmon coupling | Zendy

Zhongyuan Ma | Zendy; Xiaodong Ni | Zendy; Wenping Zhang | Zendy; Xiaofan Jiang | Zendy; Huafeng Yang | Zendy; Jie Yu | Zendy; Wen Wang | Zendy; Ling Xu | Zendy; Jun Xu | Zendy; Kunji Chen | Zendy; Duan Feng | Zendy

Open Access

Hexagonal Ag nanoarrays induced enhancement of blue light emission from amorphous oxidized silicon nitride via localized surface plasmon coupling

Author(s) -

Zhongyuan Ma,

Xiaodong Ni,

Wenping Zhang,

Xiaofan Jiang,

Huafeng Yang,

Jie Yu,

Wen Wang,

Ling Xu,

Jun Xu,

Kunji Chen,

Duan Feng

Publication year - 2014

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.22.028180

Subject(s) - materials science , optoelectronics , surface plasmon , nanosphere lithography , surface plasmon resonance , silicon nitride , amorphous silicon , silicon , substrate (aquarium) , plasmon , purcell effect , light emission , amorphous solid , nanoparticle , nanotechnology , optics , spontaneous emission , crystalline silicon , fabrication , laser , alternative medicine , oceanography , chemistry , pathology , medicine , physics , organic chemistry , geology

A significant enhancement of blue light emission from amorphous oxidized silicon nitride (a-SiNx:O) films is achieved by introduction of ordered and size-controllable arrays of Ag nanoparticles between the silicon substrate and a-SiNx:O films. Using hexagonal arrays of Ag nanoparticles fabricated by nanosphere lithography, the localized surface plasmons (LSPs) resonance can effectively increase the internal quantum efficiency from 3.9% to 13.3%. Theoretical calculation confirms that the electromagnetic field-intensity enhancement is through the dipole surface plasma coupling with the excitons of a-SiNx:O films, which demonstrates a-SiNx:O films with enhanced blue emission are promising for silicon-based light-emitting applications by patterned Ag arrays.

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