Open AccessHexagonal Ag nanoarrays induced enhancement of blue light emission from amorphous oxidized silicon nitride via localized surface plasmon coupling
Author(s) -
Zhongyuan Ma,
Xiaodong Ni,
Wenping Zhang,
Xiaofan Jiang,
Huafeng Yang,
Jie Yu,
Wen Wang,
Ling Xu,
Jun Xu,
Kunji Chen,
Feng Ding
Publication year - 2014
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.22.028180
Subject(s) - materials science , optoelectronics , surface plasmon , nanosphere lithography , surface plasmon resonance , silicon nitride , amorphous silicon , silicon , substrate (aquarium) , plasmon , purcell effect , light emission , amorphous solid , nanoparticle , nanotechnology , optics , spontaneous emission , crystalline silicon , fabrication , laser , alternative medicine , oceanography , chemistry , pathology , medicine , physics , organic chemistry , geology
A significant enhancement of blue light emission from amorphous oxidized silicon nitride (a-SiNx:O) films is achieved by introduction of ordered and size-controllable arrays of Ag nanoparticles between the silicon substrate and a-SiNx:O films. Using hexagonal arrays of Ag nanoparticles fabricated by nanosphere lithography, the localized surface plasmons (LSPs) resonance can effectively increase the internal quantum efficiency from 3.9% to 13.3%. Theoretical calculation confirms that the electromagnetic field-intensity enhancement is through the dipole surface plasma coupling with the excitons of a-SiNx:O films, which demonstrates a-SiNx:O films with enhanced blue emission are promising for silicon-based light-emitting applications by patterned Ag arrays.