Open AccessIon polished Cr/Sc attosecond multilayer mirrors for high water window reflectivity
Author(s) -
Alexander Guggenmos,
Stefan Radünz,
Roman Rauhut,
Michael Hofstetter,
Sriram Venkatesan,
Angela S. Wochnik,
Eric M. Gullikson,
Stefan Fischer,
Bert Nickel,
Christina Scheu,
Ulf Kleineberg
Publication year - 2014
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.22.026526
Subject(s) - water window , optics , attosecond , high harmonic generation , extreme ultraviolet , materials science , reflectometry , x ray optics , polishing , physics , optoelectronics , laser , ultrashort pulse , time domain , x ray , computer science , composite material , computer vision
Recent advances in the development of attosecond soft X-ray sources ranging into the water window spectral range, between the 1s states of carbon and oxygen (284 eV-543 eV), are also driving the development of suited broadband multilayer optics for steering and shaping attosecond pulses. The relatively low intensity of current High Harmonic Generation (HHG) soft X-ray sources calls for an efficient use of photons, thus the development of low-loss multilayer optics is of uttermost importance. Here, we report about the realization of broadband Cr/Sc attosecond multilayer mirrors with nearly atomically smooth interfaces by an optimized ion beam deposition and assisted interface polishing process. This yields to our knowledge highest multilayer mirror reflectivity at 300 eV near normal incidence. The results are verified by transmission electron microscopy (TEM) and soft/hard X-ray reflectometry.