Open AccessHigh-NA fiber point-diffraction interferometer for three-dimensional coordinate measurement
Author(s) -
Daodang Wang,
Xixi Chen,
Yangbo Xu,
Fumin Wang,
Ming Kong,
Jun Zhao,
Baowu Zhang
Publication year - 2014
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.22.025550
Subject(s) - optics , diffraction , interferometry , numerical aperture , physics , repeatability , aperture (computer memory) , metrology , wavelength , acoustics , mathematics , statistics
The numerical aperture (NA) and power of diffraction wave in point-diffraction interferometer (PDI) could significantly limit the measurement range of the system. A fiber point-diffraction interferometer with high NA is proposed for the measurement of absolute three-dimensional coordinates. Based on the single-mode fiber with submicron aperture, the diffraction wave with both high NA and high power is obtained, by which the achievable measurement range of the PDI can be extended. A double-iterative method based on Levenbery-Marquardt algorithm is proposed to determine the three-dimensional coordinates under measurement. Numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed PDI system, with both high measurement precision and nice repeatability achieved.