Open AccessEfficient silicon nitride grating coupler with distributed Bragg reflectors
Author(s) -
Huijuan Zhang,
Chao Li,
Xiaoguang Tu,
Jun-Feng Song,
Haifeng Zhou,
Xianshu Luo,
Ying Huang,
Mingbin Yu,
GuoQiang Lo
Publication year - 2014
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.22.021800
Subject(s) - materials science , grating , optics , photonic integrated circuit , silicon nitride , optoelectronics , fiber bragg grating , fabrication , bandwidth (computing) , photonics , coupling (piping) , electronic circuit , silicon , telecommunications , physics , computer science , wavelength , medicine , alternative medicine , pathology , metallurgy , quantum mechanics
In this paper we have designed, fabricated and characterized a high efficiency Silicon nitride grating coupler at 1490 nm. Distributed Bragg reflectors as bottom mirrors are employed to improve the coupling efficiency by reflecting the downward traveling light. The peak coupling efficiency obtained is about -2.5 dB and the 1-dB bandwidth is 53 nm. The fabrication process is CMOS-compatible and is ready to be integrated with photonic circuits.