Open AccessMEMS reconfigurable metamaterial for terahertz switchable filter and modulator
Author(s) -
Zhonghua Han,
Kenta Kohno,
Hiroyuki Fujita,
Kazuhiko Hirakawa,
Hiroshi Toshiyoshi
Publication year - 2014
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.22.021326
Subject(s) - terahertz radiation , materials science , optoelectronics , metamaterial , microelectromechanical systems , split ring resonator , resonator , surface micromachining , optics , transmittance , capacitor , terahertz spectroscopy and technology , electrical engineering , physics , voltage , fabrication , medicine , alternative medicine , pathology , engineering
We demonstrate a reconfigurable metamaterial developed by surface micromachining technique on a low loss quartz substrate for a tunable terahertz filter application. The device implements a reconfigurable RF-MEMS (radio frequency - micro electro mechanical systems) capacitor within a split-ring resonator (SRR). Time-domain spectroscopy confirms that the tunability of the SRR resonance and thus the terahertz transmittance are electrostatically controlled by the RF-MEMS capacitor. Due to the high transparency and low loss of quartz used as a substrate, the device exhibits a high contrast switching performance of 16.5 dB at 480 GHz, which is also supported by the terahertz dynamic modulation measurement results. The device shows promise for tunable transmission terahertz optics.