Open AccessSurface measurements by white light spatial-phase-shift imaging interferometry
Author(s) -
Yoel Arieli,
Shlomi Epshtein,
Igor Yakubov,
Yosi Weitzman,
Garrett Locketz,
Alon Harris
Publication year - 2014
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.22.015632
Subject(s) - optics , interferometry , white light interferometry , wavefront , reference beam , physics , spatial frequency , phase (matter) , electronic speckle pattern interferometry , adaptive optics , holographic interferometry , white light , optical path length , surface (topology) , mathematics , geometry , quantum mechanics
A novel method of common-path imaging interferometry, the White Light Spatial-Phase-Shift (WLSPS) for object surface measurements, is discussed here. Compared to standard White Light Interferometry (WLI), which uses a reference mirror, the interferometry of WLSPS is obtained by creating manipulations to the light wavefront reflected from an object's surface. Using this approach, surface measurements can be obtained from any real object image, and do not need to be taken directly from the object itself. This creates the ability for a surface measurement tool to be attached to any optical system that generates a real image of an object. Further, as this method does not require a reference beam, the surface measurement system contains inherent vibration cancelation.