Open AccessAdiabatically widened silicon microrings for improved variation tolerance
Author(s) -
Jared C. Mikkelsen,
Wesley D. Sacher,
Joyce K. S. Poon
Publication year - 2014
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.22.009659
Subject(s) - wafer , silicon on insulator , materials science , optics , lithography , wavelength , silicon , resonance (particle physics) , optoelectronics , photolithography , electron beam lithography , wafer bonding , resist , nanotechnology , physics , particle physics , layer (electronics)
We show that silicon microrings with adiabatically widened bends are more tolerant to dimensional variations than conventional microring designs with uniform waveguide widths. Through wafer-scale measurements of test structures fabricated in the IMEC Standard Passives process (193 nm DUV lithography, 200 mm SOI wafer), improvements in the intra-die and wafer-scale variation of the resonance wavelength are demonstrated. A 2.1× reduction in the standard deviation of the resonance wavelength across the wafer was observed.