Open AccessA 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head
Author(s) -
Mourad Idir,
Konstantine Kaznatcheev,
Guillaume Dovillaire,
Jérôme Legrand,
Rakchanok Rungsawang
Publication year - 2014
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.22.002770
Subject(s) - image stitching , optics , metrology , extreme ultraviolet lithography , physics , lithography , laser , adaptive optics
We present a 2D Slope measuring System based on a Stitching Shack Hartmann Optical Head (SSH-OH) aiming to perform high accuracy optical metrology for X-ray mirrors. This system was developed to perform high-accuracy automated metrology for extremely high quality optical components needed for synchrotrons or Free Electrons Lasers (FEL), EUV lithography and x-ray astronomy with slope error accuracy better than 50 nrad rms.