Open AccessSurface-normal emission from subwavelength GaN membrane grating
Author(s) -
Yongjin Wang,
Zheng Shi,
Xin Li,
Song He,
Miao Zhang,
Hongbo Zhu
Publication year - 2014
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.22.000667
Subject(s) - grating , materials science , optics , diffraction grating , optoelectronics , resonator , gallium nitride , common emitter , blazed grating , photoluminescence , layer (electronics) , nanotechnology , physics
We present here the fabrication of subwavelength GaN membrane grating with a double-side process. Controllable GaN membrane thickness is achieved by backside thinning technique, which is essential to realize guided-mode resonant GaN grating in the visible range. Subwavelength GaN grating can serve as an optical resonator and accommodate surface-normal emission coupling. The measured photoluminescence (PL) spectra are sensitive to the parameters and shapes of GaN gratings. Both numerical simulation and reflectivity measurement are in consistent with the PL experimental results. This work opens a promising way to embed GaN-based photon emitter inside subwavelength grating to further produce a surface emitting device with a single layer GaN grating.