Open AccessCharacteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas
Author(s) -
Takeshi Higashiguchi,
B. Li,
Yuhei Suzuki,
Masato Kawasaki,
Hayato Ohashi,
Shuki Torii,
Daisuke Nakamura,
Akihiko Takahashi,
Tatsuo Okada,
Weihua Jiang,
Taisuke Miura,
Akira Endo,
Padraig Dunne,
Gerry O'Sullivan,
Tetsuya Makimura
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.031837
Subject(s) - extreme ultraviolet , extreme ultraviolet lithography , laser , plasma , materials science , infrared , wavelength , ultraviolet , optics , emission spectrum , radiation , atomic physics , spectral line , physics , optoelectronics , quantum mechanics , astronomy
We characterize extreme ultraviolet (EUV) emission from mid-infrared (mid-IR) laser-produced plasmas (LPPs) of the rare-earth element Gd. The energy conversion efficiency (CE) and the spectral purity in the mid-IR LPPs at λL = 10.6 μm were higher than for solid-state LPPs at λL = 1.06 μm, because the plasma produced is optically thin due to the lower critical density, resulting in a CE of 0.7%. The peak wavelength remained fixed at 6.76 nm for all laser intensities studied. Plasma parameters at a mid-IR laser intensity of 1.3×10(11) W/cm(2) was also evaluated by use of the hydrodynamic simulation code to produce the EUV emission at 6.76 nm.