Open AccessRelations between subsurface damage depth and surface roughness of grinded fused silica
Author(s) -
P. Blaineau,
Raynald Laheurte,
Philippe Darnis,
N. Darbois,
Olivier Cahuc,
Jérôme Néauport
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.030433
Subject(s) - grinding , surface roughness , materials science , abrasive , surface finish , optics , polishing , grain size , composite material , physics
Relationships between subsurface damage (SSD) depth and peak to valley surface roughness (Rt) have been widely studied and present a major interest for an easy assessment of the SSD depth. We look at the relation between SSD depth and other surface roughness parameters using the Abbott-Firestone curve on a large campaign of grinding tests (with different abrasive grain size, grinding speed and grinding mode). The results reveal that Abbott-Firestone parameters are better for an assessment of SSD depth and that relationships between SSD depth and surface roughness are not universal but depend on the grinding process.