Open AccessLow-loss chalcogenide waveguides for chemical sensing in the mid-infrared
Author(s) -
Pan Ma,
DukYong Choi,
Yi Yu,
Xin Gai,
Zhiyong Yang,
Sukanta Debbarma,
Steve Madden,
Barry LutherDavies
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.029927
Subject(s) - chalcogenide , materials science , cladding (metalworking) , optics , prussian blue , infrared , chalcogenide glass , photolithography , fluoropolymer , optoelectronics , refractive index , infrared spectroscopy , polymer , chemistry , physics , organic chemistry , electrode , composite material , metallurgy , electrochemistry
We report the characteristics of low-loss chalcogenide waveguides for sensing in the mid-infrared (MIR). The waveguides consisted of a Ge₁₁.₅As₂₄Se₆₄.₅ rib waveguide core with a 10nm fluoropolymer coating on a Ge₁₁.₅As₂₄S₆₄.₅ bottom cladding and were fabricated by thermal evaporation, photolithography and ICP plasma etching. Over most of the functional group band from 1500 to 4000 cm⁻¹ the losses were < 1 dB/cm with a minimum of 0.3 dB/cm at 2000 cm⁻¹. The basic capabilities of these waveguides for spectroscopy were demonstrated by measuring the absorption spectrum of soluble Prussian blue in Dimethyl Sulphoxide.