Open AccessA fiber-to-chip coupler based on Si/SiON cascaded tapers for Si photonic chips
Author(s) -
Hyundai Park,
SangGi Kim,
Jaegyu Park,
Jiho Joo,
Gyungock Kim
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.029313
Subject(s) - materials science , silicon oxynitride , optics , coupling loss , silicon , waveguide , optoelectronics , silicon chip , insertion loss , power dividers and directional couplers , adiabatic process , silicon photonics , optical fiber , fiber , chip , coupled mode theory , coupling (piping) , refractive index , silicon nitride , telecommunications , physics , composite material , computer science , thermodynamics
This paper reports a fiber-to-chip coupler consisting of a silicon inverted taper and a silicon oxynitride (SiON) double stage taper, where the cascaded taper structure enables adiabatic mode transfer between a submicron silicon waveguide and a single mode fiber. The coupler, fabricated by a simplified process, demonstrates an average coupling loss of 3.6 and 4.2 dB for TM and TE polarizations, respectively, with a misalignment tolerance of ± 2.2 µm for 1 dB loss penalty.