Open AccessDevelopment of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide
Author(s) -
Qibo Feng,
Bin Zhang,
Cunxing Cui,
Cuifang Kuang,
Zhai Yusheng,
You Fenglin
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.025805
Subject(s) - standard deviation , optics , calibration , range (aeronautics) , computer science , observational error , laser , physics , system of measurement , mathematics , materials science , statistics , quantum mechanics , astronomy , composite material
A simple method for simultaneously measuring the 6DOF geometric motion errors of the linear guide was proposed. The mechanisms for measuring straightness and angular errors and for enhancing their resolution are described in detail. A common-path method for measuring the laser beam drift was proposed and it was used to compensate the errors produced by the laser beam drift in the 6DOF geometric error measurements. A compact 6DOF system was built. Calibration experiments with certain standard measurement meters showed that our system has a standard deviation of 0.5 µm in a range of ± 100 µm for the straightness measurements, and standard deviations of 0.5", 0.5", and 1.0" in the range of ± 100" for pitch, yaw, and roll measurements, respectively.