Open AccessDisplacement measurement using a wavelength-phase-shifting grating interferometer
Author(s) -
Ju Yi Lee,
Geng An Jiang
Publication year - 2013
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.025553
Subject(s) - optics , grating , interferometry , wavelength , blazed grating , diffraction grating , phase (matter) , optical path , materials science , displacement (psychology) , physics , psychology , quantum mechanics , psychotherapist
A grating interferometer based on the wavelength-modulated phase-shifting method for displacement measurements is proposed. A laser beam with sequential phase shifting can be accomplished using a wavelength-modulated light passing through an unequal-path-length optical configuration. The optical phase of the moving grating is measured by the wavelength-modulated phase-shifting technique and the proposed time-domain quadrature detection method. The displacement of the grating is determined by the grating interferometry theorem with the measured phase variation. Experimental results reveal that the proposed method can detect a displacement up to a large distance of 1 mm and displacement variation down to the nanometer range.