Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy | Zendy

Michael Caica | Zendy; Frédéric Zamkotsian | Zendy; Patrick Lanzoni | Zendy; Wilfried Noell | Zendy; Nico de Rooij | Zendy

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Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Author(s) -

Michael Caica,

Frédéric Zamkotsian,

Patrick Lanzoni,

Wilfried Noell,

Nico de Rooij

Publication year - 2013

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.21.022400

Subject(s) - optics , interferometry , spectroscopy , materials science , contrast ratio , contrast (vision) , silicon , optoelectronics , physics , astronomy

A micromirror array composed of 2048 silicon micromirrors measuring 200 × 100 μm² and tilting by 25° was developed as a reconfigurable slit mask for multi-object spectroscopy (MOS) in astronomy. The fill factor, contrast, and mirror deformation at both room and cryogenic temperatures were investigated. Contrast was measured using an optical setup that mimics a MOS instrument, and mirror deformation was characterized using a Twyman-Green interferometer. The results indicate that the array exhibited a fill factor of 82%, a contrast ratio of 1000:1, and surface mirror deformations of 8 nm and 27 nm for mirrors tilted at 298 K and 162 K, respectively.

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