Open AccessOptical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy
Author(s) -
Michael Caica,
Frédéric Zamkotsian,
Patrick Lanzoni,
Wilfried Noell,
Nico de Rooij
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.022400
Subject(s) - optics , interferometry , spectroscopy , materials science , contrast ratio , contrast (vision) , silicon , optoelectronics , physics , astronomy
A micromirror array composed of 2048 silicon micromirrors measuring 200 × 100 μm² and tilting by 25° was developed as a reconfigurable slit mask for multi-object spectroscopy (MOS) in astronomy. The fill factor, contrast, and mirror deformation at both room and cryogenic temperatures were investigated. Contrast was measured using an optical setup that mimics a MOS instrument, and mirror deformation was characterized using a Twyman-Green interferometer. The results indicate that the array exhibited a fill factor of 82%, a contrast ratio of 1000:1, and surface mirror deformations of 8 nm and 27 nm for mirrors tilted at 298 K and 162 K, respectively.