Open AccessMEMS Fabry-Perot sensor interrogated by optical system-on-a-chip for simultaneous pressure and temperature sensing
Author(s) -
Cheng Pang,
Hae-Young Bae,
Ashwani K. Gupta,
Kenneth M. Bryden,
Miao Yu
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.021829
Subject(s) - materials science , fabry–pérot interferometer , microelectromechanical systems , pressure sensor , optics , photodetector , optoelectronics , broadband , optical fiber , optical filter , pressure measurement , chip , fiber optic sensor , spectrometer , silicon , wavelength , physics , electrical engineering , meteorology , thermodynamics , engineering
We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.