Open AccessSubmicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing
Author(s) -
Mai Trang,
Thi Thanh Ngan Nguyen,
Qinggele Li,
Henri Bénisty,
Isabelle LedouxRak,
Ngoc Diep Lai
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.020964
Subject(s) - photoresist , fabrication , materials science , laser , optics , absorption (acoustics) , two photon absorption , optoelectronics , photon , spiral (railway) , nanotechnology , physics , medicine , mathematical analysis , alternative medicine , mathematics , pathology , layer (electronics)
We demonstrate a new 3D fabrication method to achieve the same results as those obtained by the two-photon excitation technique, by using a simple one-photon elaboration method in a very low absorption regime. Desirable 2D and 3D submicrometric structures, such as spiral, chiral, and woodpile architectures, with feature size as small as 190 nm have been fabricated, by using just a few milliwatts of a continuous-wave laser at 532 nm and a commercial SU8 photoresist. Different aspects of the direct laser writing based on ultralow one-photon absorption (LOPA) technique are investigated and compared with the TPA technique, showing several advantages, such as simplicity and low cost.