Open AccessHyDRa: control of parameters for deterministic polishing
Author(s) -
Elena Baraza,
Luis Salas,
Erika Sohn,
Esther Martínez Luna,
Joel Herrera,
Fernando Quirós
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.020334
Subject(s) - polishing , lernaean hydra , chemical mechanical planarization , slurry , optics , stability (learning theory) , materials science , quality (philosophy) , control (management) , computer science , control theory (sociology) , physics , composite material , machine learning , history , classics , quantum mechanics , artificial intelligence
Deterministic hydrodynamic polishing with HyDRa requires a precise control of polishing parameters, such as propelling air pressure, slurry density, slurry flux and tool height. We describe the HyDRa polishing system and prove how precise, deterministic polishing can be achieved in terms of the control of these parameters. The polishing results of an 84 cm hyperbolic mirror are presented to illustrate how the stability of these parameters is important to obtain high-quality surfaces.