Open AccessSilicon photonic slot waveguide Bragg gratings and resonators
Author(s) -
Xu Wang,
Samantha M. Grist,
Jonas Flueckiger,
Nicolas A. F. Jaeger,
Lukas Chrostowski
Publication year - 2013
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.019029
Subject(s) - materials science , resonator , optics , fiber bragg grating , phosfos , silicon on insulator , waveguide , fabrication , optoelectronics , silicon , optical fiber , fiber optic sensor , physics , plastic optical fiber , wavelength , medicine , alternative medicine , pathology
We present the design, fabrication, and characterization of integrated Bragg gratings in silicon-on-insulator slot waveguides. The Bragg gratings are formed with sidewall corrugations, either on the inside or on the outside of the waveguide. We demonstrate resonators implemented using phase-shifted Bragg gratings in slot waveguides, showing quality factors up to 3 × 10(4). Due to the strong optical confinement in the slot, these devices are promising for optical sensing applications. The devices were fabricated using a CMOS-compatible process, facilitating high-volume and low-cost production.