Open AccessFabrication of metal-oxide nano-hairs for effective index optical elements
Author(s) -
Indumathi Raghu Srimathi,
Aaron J. Pung,
Yuan Li,
Raymond C. Rumpf,
Eric Johnson
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.018733
Subject(s) - materials science , fabrication , optics , grating , refractive index , electron beam lithography , nano , wavelength , lithography , substrate (aquarium) , phase (matter) , optoelectronics , resist , nanotechnology , composite material , physics , alternative medicine , organic chemistry , chemistry , pathology , layer (electronics) , geology , medicine , oceanography
We present a method for fabricating high aspect ratio metal-oxide, sub-wavelength grating structures. These "nano-hair" structures are composed of alumina cylindrical pillars, partially embedded in a supporting fused silica substrate. The fabricated nano-hair structures demonstrate phase control of the transmitted beam while maintaining a peak transmitted power greater than 93% around a central wavelength of λ(o) = 1.55 µm. Based on this principle, discrete and continuous phase functions can be encoded by controlling the lithographic process.