Open AccessProduction of 70-nm Cr dots by laser-induced forward transfer
Author(s) -
V. Sametoglu,
Vincent T. K. Sauer,
Ying Y. Tsui
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.018525
Subject(s) - fluence , materials science , optics , laser , ablation , laser beams , laser ablation , optoelectronics , physics , aerospace engineering , engineering
The effect of donor film thickness and laser beam fluence on the size of laser-induced forward transfer (LIFT) spots is studied to achieve sub-100 nm features. A 130 fs, 800 nm laser is focused on ultrathin Cr films, and the transfer and ablation thresholds of these films at various thicknesses are determined. The minimum transfer spot size decreases with decreasing donor film thickness and incident laser fluence. Minimum LIFT spots of 70-450 nm diameter are obtained from films of 20-80 nm thickness, respectively. The 70 nm diameter transfer spots obtained from sputtered continuous films are the smallest to date.