Open AccessVibration modulated subaperture stitching interferometry
Author(s) -
Chao Liang,
Hung Sheng Chang,
Po Chih Lin,
Cheng Chung Lee,
Yi Chun Chen
Publication year - 2013
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.018255
Subject(s) - image stitching , interferometry , optics , vibration , phase (matter) , computer science , lens (geology) , acoustics , physics , quantum mechanics
A novel subaperture stitching interferometry is developed to measure the surface deformation of the lens by utilizing the mechanical vibration induced from a motorized stage. The interferograms of different subapertures are acquired on the fly while the tested optics is rotating against its symmetrical axis. The measurement throughput and the subaperture positioning accuracy are improved simultaneously by adopting both the synchronous rotational scanning mechanism and the non-uniform phase shifting algorithm. The experimental measurement shows the stitched phase RMS error of 0.0037 waves proving the feasibility of the proposed phase acquisition method.