Open AccessEnhanced white photoluminescence in silicon-rich oxide/SiO_2 superlattices by low-energy ion-beam treatment
Author(s) -
Chuan Feng Shih,
Chu Yun Hsiao,
Kai Su
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.015888
Subject(s) - materials science , photoluminescence , annealing (glass) , silicon , ion beam , superlattice , silicon oxide , oxide , argon , ion , optoelectronics , atomic physics , chemistry , composite material , silicon nitride , physics , organic chemistry , metallurgy
This study presents the crystalline and luminescence properties of silicon-rich oxide (SRO)/SiO2 superlattices in which the SRO layers were prepared with a low-energy (<60 eV) argon ion-beam treatment. Experimental results evidenced that density of the Si nanocrystals (NCs) in the SRO layer was increased by ion-beam treatment after annealing, increasing the surface roughness. The stoichiometry of the as-prepared SRO layer was unchanged but the phase separation of the annealed SRO layer was enhanced by the ion-beam treatment, yielding visible white photoluminescence from the E' centers and Si NCs.