Enhanced white photoluminescence in silicon-rich oxide/SiO_2 superlattices by low-energy ion-beam treatment | Zendy

ChuanFeng Shih | Zendy; Chu-Yun Hsiao | Zendy; K. W. Su | Zendy

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Enhanced white photoluminescence in silicon-rich oxide/SiO_2 superlattices by low-energy ion-beam treatment

Author(s) -

ChuanFeng Shih,

Chu-Yun Hsiao,

K. W. Su

Publication year - 2013

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.21.015888

Subject(s) - materials science , photoluminescence , annealing (glass) , silicon , ion beam , superlattice , silicon oxide , oxide , argon , ion , optoelectronics , atomic physics , chemistry , composite material , silicon nitride , physics , organic chemistry , metallurgy

This study presents the crystalline and luminescence properties of silicon-rich oxide (SRO)/SiO2 superlattices in which the SRO layers were prepared with a low-energy (<60 eV) argon ion-beam treatment. Experimental results evidenced that density of the Si nanocrystals (NCs) in the SRO layer was increased by ion-beam treatment after annealing, increasing the surface roughness. The stoichiometry of the as-prepared SRO layer was unchanged but the phase separation of the annealed SRO layer was enhanced by the ion-beam treatment, yielding visible white photoluminescence from the E' centers and Si NCs.

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