Open AccessDesign and fabrication of a planar PDMS transmission grating microspectrometer
Author(s) -
Seyed M. Azmayesh-Fard,
L. K. Lam,
A. Melnyk,
R. G. DeCorby
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.011889
Subject(s) - materials science , optics , grating , fluidics , refractive index , lens (geology) , diffraction grating , fabrication , collimated light , planar , microsystem , lithography , high refractive index polymer , optoelectronics , nanotechnology , laser , physics , medicine , alternative medicine , pathology , computer graphics (images) , computer science , engineering , aerospace engineering
We describe the monolithic integration of microfluidic channels, optical waveguides, a collimating lens and a curved focusing transmission grating in a single PDMS-based microsystem. All optical and fluidic components of the device were simultaneously formed in a single layer of high refractive index (n~1.43) PDMS by soft lithography. Outer layers of lower-index (n~1.41) PDMS were subsequently added to provide optical and fluidic confinement. Here, we focus on the design and characterization of the microspectrometer part, which employs a novel self-focusing strategy based on cylindrical facets, and exhibits resolution <10 nm in the visible wavelength range. The dispersive behavior of the grating was analyzed both experimentally and using numerical simulations, and the results are in good agreement with simplified analytical predictions.