Open AccessNano-patterned dual-layer ITO electrode of high brightness blue light emitting diodes using maskless wet etching
Author(s) -
Semi Oh,
Pei-Chen Su,
Yong Jin Yoon,
Soo-Haeng Cho,
Joon Ho Oh,
Tae Yeon Seong,
Kyoung Kook Kim
Publication year - 2013
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.21.00a970
Subject(s) - materials science , light emitting diode , indium tin oxide , optoelectronics , electrode , etching (microfabrication) , layer (electronics) , diode , luminous efficacy , nano , brightness , optics , nanotechnology , composite material , chemistry , physics
We propose a dual-layer transparent Indium Tin Oxide (ITO) top electrode scheme and demonstrate the enhancement of the optical output power of GaN-based light emitting diodes (LEDs). The proposed dual-layer structure is composed of a layer with randomly distributed sphere-like nano-patterns obtained solely by a maskless wet etching process and a pre-annealed bottom layer to maintain current spreading of the electrode. It was observed that the surface morphologies and optoelectronic properties are dependent on etching duration. This electrode significantly improves the optical output power of GaN-based LEDs with an enhancement factor of 2.18 at 100 mA without degradation in electrical property when compared to a reference LED.