A compact and low loss Y-junction for submicron silicon waveguide | Zendy

Yi Zhang | Zendy; Shuyu Yang | Zendy; Andy Eu-Jin Lim | Zendy; GuoQiang Lo | Zendy; Christophe Galland | Zendy; Tom BaehrJones | Zendy; Michael Hochberg | Zendy

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A compact and low loss Y-junction for submicron silicon waveguide

Author(s) -

Yi Zhang,

Shuyu Yang,

Andy Eu-Jin Lim,

GuoQiang Lo,

Christophe Galland,

Tom BaehrJones,

Michael Hochberg

Publication year - 2013

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.21.001310

Subject(s) - insertion loss , materials science , optics , finite difference time domain method , wafer , waveguide , footprint , silicon , astronomical interferometer , optoelectronics , silicon on insulator , semiconductor device fabrication , cmos , multi mode optical fiber , interferometry , physics , optical fiber , paleontology , biology

We designed a compact, low-loss and wavelength insensitive Y-junction for submicron silicon waveguide using finite difference time-domain (FDTD) simulation and particle swarm optimization (PSO), and fabricated the device in a 248 nm complementary metal-oxide-semiconductor (CMOS) compatible process. Measured average insertion loss is 0.28 ± 0.02 dB, uniform across an 8-inch wafer. The device footprint is less than 1.2 μm x 2 μm, an order of magnitude smaller than typical multimode interferometers (MMIs) and directional couplers.

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