A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection | Zendy

Chung-De Chen | Zendy; Yu-Jen Wang | Zendy; Pin Chang | Zendy

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A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection

Author(s) -

Chung-De Chen,

Yu-Jen Wang,

Pin Chang

Publication year - 2012

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.20.027003

Subject(s) - materials science , microelectromechanical systems , actuator , optics , lead zirconate titanate , laser scanning , scanning electron microscope , laser , piezoelectricity , ceramic , optoelectronics , ferroelectricity , electrical engineering , physics , dielectric , composite material , engineering

This study presents a novel design for a two-axis scanning device driven by lead-zirconate-titanate (PZT) ceramic. The proposed device consists of a scanning mirror and a Y-shaped piezoelectric actuator. The scanning mirror was fabricated using an MEMS process involving three masks. Experimental results show that the fast and slow frequencies at resonance are 25.0 kHz and 0.56 kHz, respectively. The optical scanning angles are 27.6° and 39.9°. The power consumption of the device is 13.4 mW at a driving voltage of 10 V. This study also develops a laser projection module integrated with the scanning device. The module can project a 2-D image at a resolution of 640 x 480.

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