Open AccessHigh efficiency, high selectivity ultra-thin resonant diffractive elements
Author(s) -
S. Tonchev,
Thomas Kämpfe,
Ο. Parriaux
Publication year - 2012
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.20.026714
Subject(s) - optics , diffraction , materials science , diffraction efficiency , selectivity , etching (microfabrication) , surface (topology) , optoelectronics , resonance (particle physics) , physics , nanotechnology , chemistry , biochemistry , geometry , mathematics , layer (electronics) , particle physics , catalysis
Resonant diffractive elements as the association of a surface corrugation with a surface wave exhibit boosted diffraction efficiency and high selectivity properties under the effect of ultra-shallow subwavelength surface reliefs. This is demonstrated by four examples of resonant functional structures made of very different material systems over the optical spectrum. All four structures are fabricated by slow wet etching as the inherent lateral broadening in corrugations of very small aspect ratio can be neglected.