Open AccessOptical characterization of fully programmable MEMS diffraction gratings
Author(s) -
Frédéric Zamkotsian,
B. Timotijević,
R. Lockhart,
R. P. Stanley,
Patrick Lanzoni,
M. Luetzelschwab,
Michael Caica,
Wilfried Noell,
M. Tormen
Publication year - 2012
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.20.025267
Subject(s) - optics , materials science , diffraction grating , diffraction efficiency , diffraction , extinction ratio , microelectromechanical systems , silicon , optoelectronics , physics , wavelength
We have fabricated and characterized fully programmable diffraction gratings consisting of 64 silicon micro-mirrors. The mirrors are 700µm long and 50µm wide with a fill factor of 90%. They are actuated electrostatically and move down by 1.25μm while showing negligible cross-talk and bowing as small as 0.14μm over 700μm. Extinction ratio up to 100 has been achieved by adjusting only 3 adjacent micro-mirrors. The gratings could operate either as light modulators up to 5μm or spectra generators up to 2.5μm.