Open AccessTheoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems
Author(s) -
Cunding Liu,
Mingdong Kong,
Chaowei Guo,
Weidong Gao,
Bincheng Li
Publication year - 2012
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.20.023790
Subject(s) - rotation (mathematics) , optics , radius , materials science , curvature , spherical cap , substrate (aquarium) , curved mirror , radius of curvature , aperture (computer memory) , physics , geometry , mean curvature , computer science , oceanography , mathematics , computer security , mean curvature flow , acoustics , geology
A straightforward theoretical routine is proposed to design shadowing masks which are used for preparing uniform coatings on flat as well as strongly curved spherical substrates with large diameters in planetary rotation system. By approximating a spherical substrate in planetary rotation to a corresponding flat substrate in simple rotation around the revolution axis, the initial shape of a shadowing mask is determined. The desired uniformity for the spherical substrate is further realized through expanding appropriately the arc length of the initial shadowing mask. Utilizing the shadowing masks designed with the theoretical routine, film uniformities better than 97% are experimentally achieved for large-diameter spherical substrates with ratios of clear aperture to radius of curvature range from approximately -1.0 to 1.3.