Open AccessProfile estimation for Pt submicron wire on rough Si substrate from experimental data
Author(s) -
Mirza Karamehmedović,
Poul Erik Hansen,
Kai Dirscherl,
Mirza Karamehmedović,
Thomas Wriedt
Publication year - 2012
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.20.021678
Subject(s) - bidirectional reflectance distribution function , materials science , optics , substrate (aquarium) , surface finish , scattering , surface roughness , silicon , particle (ecology) , light scattering , optoelectronics , reflectivity , physics , composite material , oceanography , geology
An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data.