Open AccessLow-loss optical waveguides and Y-branch splitters in lithium niobate fabricated by MeV oxygen ions with low dose
Author(s) -
Hui Hu,
Fei Lu,
Xue Lin Wang,
Feng Chen,
Ke Ming Wang
Publication year - 2012
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.20.021114
Subject(s) - lithium niobate , materials science , waveguide , ion , splitter , optics , refractive index , annealing (glass) , ion implantation , optoelectronics , insertion loss , oxygen , chemistry , physics , organic chemistry , composite material
Single-mode optical waveguides in LiNbO(3) substrate with loss as low as 0.17dB/cm were fabricated by a multi-energy low-dose ion implantation technology and cumulative annealing treatment. A waveguide Y-Branch splitter was demonstrated. Index profile in waveguide is described based on the ion implantation-induced damage profile, and propagation property in waveguide is simulated. Simulation results show a good consistence with the measured ones.